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Vacuum Pump×キヤノンアネルバ 栗木本社 - メーカー・企業と製品の一覧

Vacuum Pumpの製品一覧

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Piranha Gauge "M-350PG"

Piranha Gauge "M-350PG"

Pirani vacuum gauge with a wide range of applications, such as for measurement in low to medium vacuum areas and for installation in various systems!

The Pirani gauge "M-350PG" is a versatile Pirani vacuum gauge that combines ease of measurement from atmospheric pressure and high cost performance. It can be used in various industries, including food, automotive, and pharmaceuticals, for measuring in the low to medium vacuum range and for integration into various systems. 【Features】 ■ Good reproducibility and low price ■ Measurement range from 5×10^-2 Pa to atmospheric pressure ■ Suitable for measuring in the low to medium vacuum range *For more details, please refer to the PDF document or feel free to contact us.

  • Vacuum Equipment

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Vacuum pump "Ion pump - Noble pump"

Vacuum pump "Ion pump - Noble pump"

No vibration, no noise! You can use it safely for unmanned driving at night without worrying about contaminating the exhaust system!

The "Ion Pump - Noble Pump" is an ultra-high vacuum pump. By generating cold cathode discharge in a magnetic field, ionized gas molecules are embedded in the cathode, and during collisions with the cathode material (Ti), sputtering occurs, continuously creating an active getter film for evacuation. Since it does not use any oils or organic materials, it achieves a clean vacuum without contaminating the system. 【Features】 ■ Completely oil-free ■ Ultra-high vacuum, extreme ultra-high vacuum ■ Unmanned operation ■ Exhaust of inert gases (Noble Pump) *For more details, please refer to the PDF document or feel free to contact us.

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  • Vacuum pump

ブックマークに追加いたしました

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Vacuum Pump "Foreline Trap"

Vacuum Pump "Foreline Trap"

It is possible to easily prevent the backflow of oil vapor! It efficiently adsorbs oil molecules.

The "Foreline Trap" efficiently adsorbs oil molecules using a molecular sieve installed in the gas pathway. Furthermore, by cooling the molecular sieve with liquid nitrogen, it effectively adsorbs not only oil molecules but also water vapor (in the case of the Foreline Trap S). Additionally, since it has a built-in heater, the adsorption capacity of the molecular sieve can be easily regenerated by baking the molecular sieve before use. 【Features】 ■ Easily prevents backflow of oil ■ Efficiently adsorbs oil molecules using the molecular sieve installed in the gas pathway ■ The adsorption capacity of the molecular sieve can be easily regenerated by baking it before use *For more details, please refer to the PDF document or feel free to contact us.

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  • Vacuum pump

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ブックマークを削除いたしました

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これ以上ブックマークできません

会員登録すると、ブックマークできる件数が増えて、ラベルをつけて整理することもできます

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Ion gauge "M-311HG"

Ion gauge "M-311HG"

Excellent reproducibility and linearity, allowing for a wide range of pressure measurements! It has outstanding features as a vacuum gauge.

The "M-311HG" is an ion gauge from the transducer vacuum gauge series. Ion gauges (thermal cathode ionization vacuum gauges) have excellent reproducibility and linearity, allowing for a wide range of pressure measurements, making them outstanding as vacuum gauges. The sensor uses a proven miniature gauge (MG-2I type). 【Features】 ■ Wide pressure measurement range ■ High response analog output ■ Four emission current setting modes ■ Space-saving and low power consumption ■ A product that considers safety and the environment, compliant with RoHS and CE marking *For more details, please refer to the PDF document or feel free to contact us.

  • Vacuum Equipment

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Crystal Ion Gauge "M-336MX"

Crystal Ion Gauge "M-336MX"

Excellent reproducibility in high precision, low vacuum areas! This single device measures a wide pressure range from atmospheric pressure to ultra-high vacuum.

The "M-336MX" is a combination gauge that features a crystal gauge with excellent reproducibility and responsiveness for low vacuum measurements, and a miniature B-A gauge with a long track record for high vacuum measurements. It can measure a wide pressure range from atmospheric pressure to ultra-high vacuum with this one device. It can be used for rough pumping and final pressure measurements of vacuum systems, as well as pressure measurements in semiconductor and electronic component manufacturing equipment. 【Features】 ■ Combination gauge that combines a crystal gauge and a miniature B-A gauge ■ From ultra-high vacuum to atmospheric pressure ■ High precision and excellent reproducibility in low vacuum regions *For more details, please refer to the PDF document or feel free to contact us.

  • Vacuum Equipment

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Cold Cathode Pirani Gauge "M-361CP"

Cold Cathode Pirani Gauge "M-361CP"

Easy maintenance with only parts replacement! Contributes to cost reduction and management load reduction of the system with dual functionality.

The M-361CP is a combination gauge that integrates a Pirani gauge for measuring atmospheric pressure to medium vacuum and a cold cathode gauge for measuring high to ultra-high vacuum. It can measure a wide pressure range with a single unit, contributing to cost reduction and reduced management burden for the system by serving dual purposes. Additionally, it features easy maintenance with only parts replacement required. 【Features】 ■ Improved measurement stability - The newly developed discharge assist function reduces switching failures between the Pirani and cold cathode, as well as measurement interruptions due to lack of discharge. ■ Achieves excellent atmospheric pressure detection (compared to our products) - The Pirani gauge equipped in this device has improved stability and reproducibility near atmospheric pressure. *For more details, please refer to the PDF document or feel free to contact us.

  • Vacuum Equipment

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Piranha Gauge (Ni Filament) 'M-351PG'

Piranha Gauge (Ni Filament) 'M-351PG'

Highly reproducible and low-cost, with no restrictions on installation direction! A model compatible with hard process equipment.

The Pirani gauge "M-351PG" uses Ni filament to improve corrosion resistance and is compatible with hard process equipment such as RIE and CVD. It offers good reproducibility at a low price, with no restrictions on installation direction. It can be used in various devices, including semiconductor and electronic device manufacturing equipment, as well as food and pharmaceutical manufacturing equipment. 【Features】 - Improved corrosion resistance (such as the use of Ni filament) - Good reproducibility at a low price - Operating range from 5×10^-2 Pa to atmospheric pressure - No restrictions on installation direction *For more details, please refer to the PDF document or feel free to contact us.

  • Vacuum Equipment

ブックマークに追加いたしました

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これ以上ブックマークできません

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Ion pump/noble pump control device "P-500"

Ion pump/noble pump control device "P-500"

Improved visibility and functionality with the new design! Suitable for automation equipment and remote control devices.

The "P-500" is a control device for operating ion pumps or noble pumps in high vacuum conditions ranging from 10^-2 Pa to 10^-4 Pa or lower. It features large green LEDs for improved visibility from a distance. While considering compatibility with conventional models, it achieves enhanced functionality and compliance with CE and RoHS standards. In addition to its comprehensive I/O functions, it is suitable for automation equipment and remote operation devices, with the possibility of supporting RS232C communication through optional board additions. 【Features】 ■ High performance ■ Comprehensive functionality ■ High compatibility ■ Communication support ■ Compliance standards: CE marking, RoHS directive compliance *For more details, please refer to the PDF materials or feel free to contact us.

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  • Vacuum pump
  • Other process controls

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Ultra-high vacuum compatible sputter ion pump "Excel Pump"

Ultra-high vacuum compatible sputter ion pump "Excel Pump"

40% size reduction! Achieves high efficiency with built-in baking heater and moisture retention cover.

The "Excel Pump" is a compact and lightweight vacuum pump. Based on an ion pump, it has been developed by improving the discharge characteristics in low-pressure regions, featuring pump elements and a built-in heater that enables efficient baking. Additionally, the incorporation of a NEG (non-evaporable getter) pump allows for the achievement of XHV. 【Features】 ■ High exhaust capacity in UHV and XHV regions ■ Realization of high-efficiency baking ■ Compact and lightweight ■ Compatible with clean rooms *For more details, please refer to the PDF document or feel free to contact us.

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  • Vacuum pump

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High Cost Performance: Capacitance Gauge / Cold Cathode Pirani Gauge

High Cost Performance: Capacitance Gauge / Cold Cathode Pirani Gauge

A vacuum gauge suitable for various vacuum systems.

The "Capacitance Gauge" is a temperature-compensated diaphragm vacuum gauge that can measure absolute pressure with high precision and stability. It features excellent zero-point stability, low temperature dependence, and outstanding vibration resistance. The "Cold Cathode Pirani Gauge" is a combination gauge that combines a robust cold cathode gauge (cold cathode ionization vacuum gauge) and a Pirani gauge, offering a wide pressure measurement range from atmospheric pressure to high vacuum. For more details, please refer to the PDF document or feel free to contact us.

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  • Other measurement, recording and measuring instruments

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